Physical Design and Mask Synthesis for Directed Self-Assembly Lithography\nby Seongbo Shim\nPaperback\nEnglish\n\nBrand new copy from BookCurl \u2013 the UK independent online bookseller.\n\n------------------------------\nBook details\n------------------------------\nAuthor: Seongbo Shim\nTitle: Physical Design and Mask Synthesis for Directed Self-Assembly Lithography\nFormat: Paperback\nLanguage: English\nTopic: Nanotechnology\nPublisher: Springer Nature Switzerland AG\nPublication year: 2019\nEdition: Softcover reprint of the original 1st ed. 2018\nISBN-13: 9783030094553\nISBN-10: 3030094553\nRRP: \u00A389.99\n\n------------------------------\nDescription\n------------------------------\n\nThis book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-.